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Air Bearing Stage - List of Manufacturers, Suppliers, Companies and Products

Air Bearing Stage Product List

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New product! Thin Air Bearing Z Tip/Tilt Stage

New product! Thin Air Bearing Z Tip/Tilt Stage

Releasing a high-precision air bearing stage with 3-axis motion on a single thin platform!

PI is expanding its air bearing positioning products! We have released the "A-523 model: Air Bearing Z-axis, Chip/Tilt 3-axis drive stage" designed with a parallel kinematic approach. Achieving ultra-high precision positioning in a slim design A motion platform with no friction Offering the best performance, quality, and lifespan 【Features】 - Travel range: Z-axis ±2.5 mm, θX, θY axes ±1° - Load capacity: 8 kg - Platform: Diameter 250 mm - Height: 60 mm *For more details, please download the PDF or contact us.

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PIglide Linear Air Bearing Stage 'A-110'

PIglide Linear Air Bearing Stage 'A-110'

Air bearing stage optimal for scanning or high-resolution positioning.

The "PIglide Direct-Drive Air Bearing Series" features magnetically preloaded air bearings and is driven by a linear servo motor with an integrated optical linear encoder. By combining these non-contact components, we have achieved a frictionless motion platform with the best performance, quality, and product lifespan. The air bearing stage series includes options such as the "XY-axis Small Air Bearing Stage," "XY-axis Large Air Bearing Stage," and "Air Bearing Rotary Stage." 【Features】 ■ Non-contact fully preloaded air bearings ■ Ideal for scanning or high-resolution positioning ■ Compatible with clean rooms ■ Customizable ■ Integrated optical linear encoder For more details, please refer to the catalog or feel free to contact us.

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Linear Air Bearing Stage PIglideA-121 High Precision Model

Linear Air Bearing Stage PIglideA-121 High Precision Model

Non-contact, wear-free, and long-lasting, achieving smooth operation at the nanometer level.

The PIglide A-121 is a linear stage that combines magnetic direct drive and air bearing technology. It achieves zero friction and backlash, with excellent straightness (up to ±50nm) and repeatability (up to ±10nm). Its non-contact structure ensures a long lifespan with minimal maintenance. It supports a maximum travel distance of 500mm and a maximum speed of 500mm/s. This configuration is ideal for semiconductor inspection equipment and precision measurement devices that require high-precision positioning and speed control.

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  • Cartesian Robot
  • encoder

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Small Linear Air Bearing Stage A-143 High Precision Type

Small Linear Air Bearing Stage A-143 High Precision Type

Zero friction. Achieving high-precision positioning of ±0.2 µm within a movement range of 25 mm.

The A-143 PIglide is a compact linear air bearing stage with a travel range of 25 mm. Its non-contact structure eliminates the need for wear and lubrication, achieving long life and compatibility with clean rooms. It boasts a minimum increment of 0.025 µm, position accuracy of ±0.2 µm, and straightness of ±0.05 µm, providing nanometer-level precision, making it ideal for staging in measurement, inspection, and optical equipment. It features a built-in linear motor and a 32-bit BiSS-C encoder, enabling high-performance motion with a maximum speed of 390 mm/s and acceleration of 10 m/s².

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  • Cartesian Robot
  • encoder

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Hemisphere Air Bearing Module A-65x High Load Capacity Specification

Hemisphere Air Bearing Module A-65x High Load Capacity Specification

Optimal contactless structure for space and microgravity environment simulation.

The A-65x is a hemispherical air bearing module that supports a maximum diameter of 300mm and a maximum load of 635kg, providing highly flexible rotational motion across three axes: θX, θY, and θZ. With a design that eliminates friction and requires no lubrication, it achieves high rigidity and reproducibility. The ±45° chip/tilt range makes it ideal for posture control, tilt testing, and simulating artificial weightlessness environments. It is compatible with clean rooms and can be widely used for research purposes as well as satellite structural testing.

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  • Metal bearings

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Air bearing stage

Air bearing stage

Air Stage LBT Series

Air Stage LBT Series Compatible with Class 1 clean rooms Stroke range from 50 mm to 500 mm Encoders can be selected from 1 µm to 0.05 µm depending on the application Straightness and flatness are 0.5 µm/300 mm Pitching and yawing are ±2 arc seconds Delivery is possible in a fully assembled state from a condition without coils, magnets, or encoders There is a wealth of overseas delivery records for semiconductor inspection equipment, and this is the first introduction in Japan. Standardization enables low costs and short delivery times. There is also a lineup of XY stages.

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  • Semiconductor inspection/test equipment
  • Linear motor

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