Air Bearing Stage

New product! Thin Air Bearing Z Tip/Tilt Stage

Releasing a high-precision air bearing stage with 3-axis motion on a single thin platform!

PI is expanding its air bearing positioning products! We have released the "A-523 model: Air Bearing Z-axis, Chip/Tilt 3-axis drive stage" designed with a parallel kinematic approach. Achieving ultra-high precision positioning in a slim design A motion platform with no friction Offering the best performance, quality, and lifespan 【Features】 - Travel range: Z-axis ±2.5 mm, θX, θY axes ±1° - Load capacity: 8 kg - Platform: Diameter 250 mm - Height: 60 mm *For more details, please download the PDF or contact us.

Company：PI Japan
Price：Other

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PIglide Linear Air Bearing Stage 'A-110'

Air bearing stage optimal for scanning or high-resolution positioning.

The "PIglide Direct-Drive Air Bearing Series" features magnetically preloaded air bearings and is driven by a linear servo motor with an integrated optical linear encoder. By combining these non-contact components, we have achieved a frictionless motion platform with the best performance, quality, and product lifespan. The air bearing stage series includes options such as the "XY-axis Small Air Bearing Stage," "XY-axis Large Air Bearing Stage," and "Air Bearing Rotary Stage." 【Features】 ■ Non-contact fully preloaded air bearings ■ Ideal for scanning or high-resolution positioning ■ Compatible with clean rooms ■ Customizable ■ Integrated optical linear encoder For more details, please refer to the catalog or feel free to contact us.

Company：PI Japan
Price：Other

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Linear Air Bearing Stage PIglideA-121 High Precision Model

Non-contact, wear-free, and long-lasting, achieving smooth operation at the nanometer level.

The PIglide A-121 is a linear stage that combines magnetic direct drive and air bearing technology. It achieves zero friction and backlash, with excellent straightness (up to ±50nm) and repeatability (up to ±10nm). Its non-contact structure ensures a long lifespan with minimal maintenance. It supports a maximum travel distance of 500mm and a maximum speed of 500mm/s. This configuration is ideal for semiconductor inspection equipment and precision measurement devices that require high-precision positioning and speed control.

Company：PI Japan
Price：Other

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Small Linear Air Bearing Stage A-143 High Precision Type

Zero friction. Achieving high-precision positioning of ±0.2 µm within a movement range of 25 mm.

The A-143 PIglide is a compact linear air bearing stage with a travel range of 25 mm. Its non-contact structure eliminates the need for wear and lubrication, achieving long life and compatibility with clean rooms. It boasts a minimum increment of 0.025 µm, position accuracy of ±0.2 µm, and straightness of ±0.05 µm, providing nanometer-level precision, making it ideal for staging in measurement, inspection, and optical equipment. It features a built-in linear motor and a 32-bit BiSS-C encoder, enabling high-performance motion with a maximum speed of 390 mm/s and acceleration of 10 m/s².

Company：PI Japan
Price：Other

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Air Stage LBT Series

Air Stage LBT Series Compatible with Class 1 clean rooms Stroke range from 50 mm to 500 mm Encoders can be selected from 1 µm to 0.05 µm depending on the application Straightness and flatness are 0.5 µm/300 mm Pitching and yawing are ±2 arc seconds Delivery is possible in a fully assembled state from a condition without coils, magnets, or encoders There is a wealth of overseas delivery records for semiconductor inspection equipment, and this is the first introduction in Japan. Standardization enables low costs and short delivery times. There is also a lineup of XY stages.

Company：TOYO ROBOTICS
Price：100,000 yen-500,000 yen

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Semiconductor inspection/test equipment
Linear motor
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Compact Linear Air Bearing Stage for Optical Equipment A-143

Zero friction, high-precision positioning. Revolutionizing the adjustment work of optical devices.

In the optical equipment industry, precise adjustments of components such as lenses and mirrors are crucial factors that influence product performance. Particularly in situations that require fine positional adjustments, a high-precision staging system is essential. If the adjustment accuracy is low, it can lead to a decline in the performance of the optical system, potentially adversely affecting the quality of the final product. The A-143 PIglide positions with nanometer-level accuracy, streamlining the adjustment tasks for optical equipment. 【Application Scenarios】 - Position adjustment of optical lenses - Calibration of precision measuring instruments - Fiber optic alignment 【Benefits of Implementation】 - Achieving high-precision adjustment tasks - Reducing work time - Improving product quality

Company：PI Japan
Price：Other

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[A-143 High Precision Linear Air Bearing Stage for Semiconductor Manufacturing]

A compact stage that achieves zero friction and high-precision positioning of ±0.2 µm.

In the semiconductor manufacturing industry, precise positioning of wafers and masks is a crucial factor that affects product quality and yield. Particularly in fine processing and inspection processes, nanometer-level accuracy is required. Low positioning accuracy can lead to the occurrence of defective products and a decrease in production efficiency. The A-143 high-precision linear air bearing stage, with its non-contact structure, eliminates the need for wear and lubrication, achieving long life and compatibility with clean rooms, thus meeting the high-precision positioning needs in semiconductor manufacturing. 【Usage Scenarios】 - Semiconductor manufacturing equipment - Inspection equipment - Measurement instruments 【Benefits of Implementation】 - Improved quality through high-precision positioning - Extended lifespan due to non-contact structure - High reliability through clean room compatibility

Company：PI Japan
Price：Other

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Compact Linear Air Bearing Stage for Precision Measurement A-143

A compact air bearing stage that achieves zero friction and high-precision positioning.

In the field of precision measurement, high-accuracy positioning is essential. Particularly in the measurement and inspection of fine structures, even slight vibrations or errors can significantly impact the measurement results. The A-143 PIglide, with its non-contact structure, eliminates the need for wear and lubrication, achieving long life and compatibility with clean rooms, making it ideal for measurement applications that require nanometer-level precision. 【Application Scenarios】 - Precision measurement instruments - Inspection devices - Optical equipment 【Benefits of Implementation】 - Achievement of high-accuracy measurement results - Establishment of a stable measurement environment - Reduction of long-term operational costs

Company：PI Japan
Price：Other

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PIglideA-121 High Precision Model for Semiconductor Testing

Non-contact, wear-free, and long-lasting, achieving smooth operation at the nanometer level.

In the semiconductor manufacturing industry, high-precision positioning is a crucial factor that affects product quality and yield. Particularly in microfabrication and inspection processes, accurate positioning at the nanometer level is required. Conventional stages that involve friction have faced challenges with precision degradation due to wear and backlash. The PIglide A-121 combines magnetic direct drive and air bearing technology to address these issues. 【Application Scenarios】 - Semiconductor inspection equipment - Precision measurement devices - Microfabrication 【Benefits of Implementation】 - Improved quality through high-precision positioning - Extended lifespan due to non-contact structure - Reduced maintenance costs

Company：PI Japan
Price：Other

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[For FPD Manufacturing] Small Linear Air Bearing Stage A-143

Zero friction, high-precision positioning. Contributes to quality improvement in the FPD inspection process.

In the FPD manufacturing industry, high-precision positioning is required in the inspection process. Particularly in the detection of fine defects and dimensional measurements, accurate positioning is essential to suppress the occurrence of defective products and improve yield. Using a stage with low positional accuracy can compromise the reliability of inspection results and make accurate evaluation difficult. The A-143 PIglide contributes to the improvement of FPD inspection quality with its high-precision positioning of ±0.2 µm. 【Application Scenarios】 - FPD defect inspection - Dimensional measurement - Alignment 【Benefits of Implementation】 - Improved inspection accuracy - Reduced defect rate - Increased productivity

Company：PI Japan
Price：Other

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Air Bearing Stage - List of Manufacturers, Suppliers, Companies and Products | IPROS GMS